Disruptive Technology Revolutionizing MEMS Sensors

Piezoresistive Nano-Gauge Detection

Multi-Axis Sensor Platform

Inertial Sensors (Accelerometers, Gyroscopes, IMUs)

Pressure Sensors

Highest Resolution & Bias Stability

Revolutionizing MEMS Sensors

iNGage’s technology enables the co-integration of accelerometers, gyroscopes and/or pressure sensors on a single chip. This is made possible by a unified fabrication process used for both pressure and inertial sensors, ensuring seamless integration and enhanced performance. iNGage’s unique and scalable MEMS technology platform enables the production of:

By unlocking new levels of precision, compactness, and cost efficiency, iNGage is paving the way for next-generation high-performance Inertial Measurement Units (IMUs) and navigation systems.

Ultra-Sensitive Piezoresistive Nano-Gauge Detection

iNGage is revolutionizing inertial sensing by leveraging CEA-Leti’s M&NEMS technology that combines the scalability of MEMS technologies with a smaller and ultra-sensitive piezoresistive nano-gauge detection principle.

This technology is the result of 15 years of R&D and is protected by more than 30 patents and counting.

Overcoming the Limitations of Capacitive MEMS and Traditional Technologies

This NEMS-based sensor innovation delivers an unprecedented level of sensitivity, exceeding capacitive MEMS by a factor of more than 10.

This disruptive approach has already led to the prototyping of gyros approaching FOG-level performance (Fiber Optic Gyros) at a fraction of their cost, achieving:

0.05°/h

Bias Instability

0.006°/√h

Angular Random Walk

Additionally, absolute barometric pressure sensors featuring built-in self-test and vibration immunity reach a resolution of less than 1 Pa, enabling the detection of altitude variations as small as 1 cm, making them suitable for a wide range of applications.

Fabless Model Using Standard MEMS and ASIC Production Infrastructures

Built on standard MEMS process blocks and equipment, our technology is designed for seamless integration into existing high-volume, automotive-qualified MEMS and ASIC foundries. By adopting a fabless business model, iNGage ensures scalability, cost efficiency, and rapid market deployment.

In Collaboration with 2 Leading European R&D Partners

To pursue its innovations and long term product development roadmap for gyros, accelerometers, IMUs and pressure sensors, iNGage has established 2 joint R&D labs with CEA-Leti and Politecnico di Milano.